Ion Sputter coater, SBC-12, Target available for Au, Ag, Cu, Al
KYKY invented the first set of Turbo Molecular Pump, Commercial Helium Leak Detector and Scanning Electron Microscope in China.
In 1970s, KYKY , SEM branch of KYKY successfully developed the first Scanning Electron Microscope in China.
Sputtering coater for SEM sample preparation,non-conducting sample preprocessing.
Medium gas:air or argon,with argon inlet and air inflation microadjuster. Customized available, for example(equip with coating thickness gauge)
Advantages:
small size; user-friendly operation; adapted to most of the metal target; Argon mode available.
Specifications:
| Working Chamber Diameter: | 75-150mm |
| Vacuum system | Rotary Pump for Evacuation, 2L/s |
| Deposition Rate: | 2-10 nm/min |
| Power: | 220V/50Hz |
| Glass processing chamber | ∮100mm; 130mm High. |
| Specimen stage size: | ∮40mm( Hold 6 specimen cups) |
| Golden target size: | ∮58mm*0.12mm(thickness) |
| Vacuum detection: | Pirani gage |
| Vacuum protection: | 20 pa with microscale inflation valve |
| Medium Gas: | Argon or air with argon gas special air inlet and gas regulating in microscale. |
Applications:
Specimen premade for scanning electron( capable of sputtering , gold. silver, copper, titanium and aluminium. )
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