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  • Vacuum Pump
    • Turbomolecular Pump
      • Magnetically Levitated pump
        • CXF-200/1401E
        • CXF-250/2301E
        • CXF-320/3001E
      • Grease lubricated pump
        • FF-63/80
        • FF-100/110
        • FF-100/150
        • FF-100/300
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        • FF-250/2000
      • Oil lubricated pump
        • FF-160/620
        • FF-400/3500B
    • Rotary Vane Pump
  • Pump Station
    • FJ-80
    • FJ-110
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    • FJ-700
  • Gate Valve
    • Electric driven Valve
    • Manual driven Valve
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  • Scanning Electron Microscope
    • Ion Sputter coater SBC-12
    • SEM-EM8100F
  • Helium Leak Detector
    • ZQJ-2000
    • ZQJ-3200
  • Vacuum Gauge
    • ZDF-11B5
    • ZDF-62B5
    • ZDR-12-06B
    • ZDZ-52/07B

Featured products

  • Turbo Molecular Pump, FF-63/80E with integrated...

    Turbo Molecular Pump, FF-63/80E with integrated...

  • Magnetically Levitated Pump, CXF-320/3001E, Wat...

    Magnetically Levitated Pump, CXF-320/3001E, Wat...

  • Rotary Vane Pump, RV-2-24, High speed, Low nois...

    Rotary Vane Pump, RV-2-24, High speed, Low nois...

  • Gate Valve,Pneumatic Drive,CCQseries DN35-400

    Gate Valve,Pneumatic Drive,CCQseries DN35-400

  • Turbo Molecular Pump, FF-160/700E/FE, Air cooli...

    Turbo Molecular Pump, FF-160/700E/FE, Air cooli...

  • Turbo Molecular Pump, F-400/3500B, Water coolin...

    Turbo Molecular Pump, F-400/3500B, Water coolin...

ZDF-11B5

  • Compound Vacuum Gauge, ZDF-11B5, 10E5 to 10E-5 Pa, Rs-485(Modbus-RTU)

    Compound Vacuum Gauge, ZDF-11B5, 10E5 to 10E-5 Pa, Rs-485(Modbus-RTU)

    Model ZDF-11A2 compound vacuum gauge composed of low and high vacuum measuring units can achieve the continuous measurement and control for 1×10E5~1×10E-5Pa with accuracy ±1%, 4 loops and with Rs485(Modbus-RTU) interface. 

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