It is the Upgrade version of EM8000, with upgraded E-Beam tube acceleration, varies vacuum mode, available to observe non-conducting sample at low voltage without sputtering, easy, convenient and friendly operation system, multiple extension remodel plan. It also the first FEG SEM which has the resolution at 1nm(30kV).
1,Schittky electron gun, high brightness, good monochromaticity, small beam spot, long life duration.
2,With E-beam tube accelaration, optional stage deceleration
3,Stable beam current, low energy spread
4,Non- conducting sample observe without sputtering in low voltage
5,Easy, convenient and friendly operation interface
6,Huge 5 axes motorized stage
|Accelerating Voltage||0-30kV continuous&adjustable|
|Electron Gun||Schottky field emission gun|
|Cathode Emitter||Tungsten mono-crystal|
|Five Axes Eucentric Auto Stage||X:0~150mm|
|L*W*H||342mm*324mm*320mm(inside chamber size)|