Configurations:
| Name | Number |
| F-160/620 molecular pump and power supply | 1 |
| RV-6 mechanical pump | 1 |
| Frame | 1 |
| Control power supply | 1 |
| ZDF-11B5 combination vacuum gauge | 1 |
| Other attachments |
Main Parameters:
Leaking rate of vacuum system: ≤ 1×10-9Pa·m3/S
Power supply voltage: 380V±10/50Hz
Cooling mode: air or water cooling
Ambient temperature for equipment utilization: 5-40℃
Ambient humidity for equipment utilization: ≤ 80%
Specifications:
| Unit | FJ-620 | |
| Flange(In) | DN150 CF | |
| DN150 ISO-K | ||
| Flange(Out) | ISO-KF | DN40 |
| Pumping Speed | l/s | N2:600 |
| He:380 | ||
| H2:240 | ||
| Ar:580 | ||
| Compression Ratio | N2:109 | |
| He:105 | ||
| H2:104 | ||
| Ar:109 | ||
| Ultimate Pressure | Pa | CF:5×10-5 |
| recommended forevacuum pressure | Pa | 100 |
| forevacuum pump | RV-6( default ) | |
| Cooling Type,Standard | Air or water | |
| Cooling Water Consumpyion | L/min | >1 |
| Cooling Water Temperature | ℃ | ≤25 |
| Input voltage/ frequency | V/Hz | 380±20/50 |
| Environment temperature (℃) | Water cooling | 5℃-40℃ |
| Air cooling | 5℃-32℃ | |
| mounting position | Vertical | |
| Controller Model | TCDP-Ⅱ | |
| L*W*H | mm | 550×690×956(LF) |
| 550×690×970(CF) | ||
| Weight | kg | 117 |