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Professional China Vacuum Pressure Gauge - Turbo Molecular Pump, FF-160/620E, Water cooling, Oil lubrication – KYKY Detail:
Advantages:
1. Good performance under harsh environmental (high temperature, dust, etc.).
2. Stable performance and long service life
3. Simple maintenance, convenient operation
Applications:
The oil lubrication turbo pumps are mainly used in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries.
Specifications :
| Flange(In) |
DN150 CF/ISO-K
|
Max. Continuous Fore-vacuum pressure(Pa) |
240
|
| Flange(Out) KF |
DN40 KF
|
Max. Fore-vacuum Pressure (Pa) |
N2:350
|
| Pumping Speed( L/s) |
N2:600
|
Gas Throughout (sccm) |
N2:1200
|
|
He:380
|
He:880
|
|
H2:240
|
H2:700
|
|
Ar:580
|
Ar:450
|
| Compression Ratio |
N2:109
|
Rotation Speed ( rpm) |
36000
|
|
He:105
|
Run-Up Time(min) |
≤9
|
|
H2:104
|
Cooling Type,Standard |
Water/Air
|
|
Ar:109
|
Cooling Water Consumption ( L/min) |
≥1
|
| Ultimate Pressure(Pa) |
CF:6×10-8
|
Cooling Water Temperature(℃) |
≤25
|
|
ISO-K:6×10-7
|
Power Connection:Voltage (V AC) |
220±22
|
| Controller Model |
TCDP-II
with 2.5 meter cable
|
Max.Power Consumption (W) |
≤500
|



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