Vacuum Gauge
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Compound Vacuum Gauge, ZDF-62B5, 10E5 to 10E-7 Pa, 6 loops, Rs485
Model ZDF-62B5 compound vacuum gauge is composed of 2 sets of low vacuum measuring units and 1 set of high vacuum measuring units. One unit of resistance gauge (RG 2)is used to achieve the measurement (1.0×10E5Pa～1.0×10E-7Pa)independently, the unit of resistance gauge( RG1) combined with ionization gauge, as compound unit, is to achieve the continuous control and measurement (1×10E5～1×10E-7Pa).
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Magnetically Levitated Pump, CXF-200/1401E, Water cooling, On board
The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.
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Maglev Pump, CXF-250/2301E, ISO-K/CF , Water cooling On Board
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force, meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
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Magnetically Levitated Pump, CXF-320/3001E, Water cooling, ISO-F, On board
The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.
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Turbo Molecular Pump, FF-160/620E, Water cooling, Oil lubrication
The oil lubrication turbo pumps are products of compact and high-performance developed by KYKY. The advantages of the oil lubrication turbo pumps are compact structure, convenient operation, flexible installation, wide application range and stable performance.