Vacuum Gauge
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Compound Vacuum Gauge, ZDF-11B5, 10E5 to 10E-5 Pa, Rs-485(Modbus-RTU)
Model ZDF-11A2 compound vacuum gauge composed of low and high vacuum measuring units can achieve the continuous measurement and control for 1×10E5～1×10E-5Pa with accuracy ±1%, 4 loops and with Rs485(Modbus-RTU) interface.
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Magnetically Levitated Pump, CXF-200/1401E, Water cooling, On board
The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.
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Maglev Pump, CXF-250/2301E, ISO-K/CF , Water cooling On Board
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force, meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
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Magnetically Levitated Pump, CXF-320/3001E, Water cooling, ISO-F, On board
The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.
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Turbo Molecular Pump, FF-160/620E, Water cooling, Oil lubrication
The oil lubrication turbo pumps are products of compact and high-performance developed by KYKY. The advantages of the oil lubrication turbo pumps are compact structure, convenient operation, flexible installation, wide application range and stable performance.
